ATI wafer inspection equipment series

AdvanTools' ATI series metrology equipment is designed for optical metrology request in semiconductor chip manufacturing. It combines three functionalities in one system: Overlay measurement, CD

measurement and customer defined defect inspection. Overlay measurement can be used for 90nm node, CD measurement and defect inspection can be used for 0.5um or larger pattern measurement.

ATI series have the advantage with high throughput, high precision, flexible applications by making use of advanced imaging and processing technologies. ATI series can be widely used in semiconductor, MEMS, LED, and so on.

ATI2000

ATI2000

ATI2000P

ATI2000P

 

ATI Specifications

#

Item

Unit

ATI2000

ATI2000P

1

Supported Wafer Size

[Inch]

max :8"

max :8" 12"

2

Min Measurable Structure

[um]

0.5

0.5

3

CD Measurement Repeatability

[3σ,nm]

8

8

4

Overlay Measurement Repeatability

[3σ,nm]

6

6

5

Supported Defect

[N/A]

Particle;Scratch; Pattern damage or customer defined defect

Particle;Scratch; Pattern damage or customer defined defect

6

Loading

[N/A]

Manual

Auto

7

Focus

[N/A]

Auto

Auto