Core Technology

  • speed lithography
    • inclined exposure technology
    • secondary imaging technology
    • High-speed real-time data processing and transmission chain
    • Platform continuous synchronous scanning exposure technology
    • Multi-head synchronization technology
    • graphics data processing technology
  • Precision platform technology
    • confidential environment control
    • Precision platform synchronized with laser scanning technology
    • High Speed Auto Focus technology
    • graphics scanning and stitching technology
    • optical alignment technology and graphic position accuracy
  • DUV lithography
    • deep ultraviolet optical systems
    • DUV DMD
    • DUV photoresist technology